Data Product Line XC
Max voltage (kV) 160 190 225 240
Min. voltage (kV) 20
Max. current (mA) 3.0R / 1.0T
Min. current (mA) 0.05
Max, power, emission (Watt) 350H / 80T
Max, power, target (Watt) 300R / 10T
JIMA resclution (um) 2.0R / 0.9T
Tube type Dual head
Target types Reflection / Transmission
Target material (substrate/active layer) Tungsten / Beryllium / Tungsten
Min. focus-object-distance (FOD,mm) 4.0 / 0.25
Opening angle (approx.°) 30 / 160
Mounting length ind. 90°HV plug (mm) 718 / 706 810 / 762
Tube weight (approx. kg) 53 76
R refrection Tube
T Transmission Tube
  • Exchangeable tube heads with automatic recognition
  • Ulimate tube power of 350 Watt / 250kVR
  • JIMA resolution 0.9 microns (um)T
  • Paramount flexibility for versatile applications
  • Automatic Internsity Control (AIC) for continuous inten - sity of radialion
  • Automatic tube calbration for optimum performance
  • Easy maintenance with adjusted ready-to-use click-in cathodes and automatic tube venting
  • Unlimited lifelime